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		<title>烘焙 on Warm IR Patio Comfort</title>
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				<title>光刻胶烘烤灯</title>
				<link>http://warm-ir-patio-comfort.com/zh/posts/photoresist-baking-lamp/</link>
				<pubDate>Mon, 01 Jun 2026 17:39:01 +0800</pubDate>
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				<description>&lt;p&gt;&lt;img src=&#34;http://warm-ir-patio-comfort.com/images/e619a459508a95cd74ea4eae0be40cd1.png&#34; alt=&#34;光刻胶烘烤灯&#34;&gt;&lt;/p&gt;&#xA;&lt;p&gt;在光刻车间，你学得很快：即使软烘烤温度漂移0.3℃，也会表现为CD偏差；而硬烘烤无法重复，则会将相同的漂移写入每片晶圆。光刻胶烘烤不仅仅是一个热处理程序。它是一个工艺边界。当灯管性能不足时，你不仅是在追赶波动——你还在烧废品，并且在本应稳定的步骤上浪费工程时间。&lt;/p&gt;</description>
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